US 12,229,340 B2
Selective laser etching of layered fluidistors
Serol Turkyilmaz, Redmond, WA (US); and Daniel Myers, Kirkland, WA (US)
Assigned to Meta Platforms Technologies, LLC, Menlo Park, CA (US)
Filed by META PLATFORMS TECHNOLOGIES, LLC, Menlo Park, CA (US)
Filed on Dec. 16, 2020, as Appl. No. 17/123,683.
Claims priority of provisional application 63/041,256, filed on Jun. 19, 2020.
Prior Publication US 2021/0397259 A1, Dec. 23, 2021
Int. Cl. G06F 3/01 (2006.01); C03B 23/20 (2006.01); C03C 15/00 (2006.01); F16K 15/02 (2006.01); F16K 27/10 (2006.01); F16K 99/00 (2006.01); G02B 27/01 (2006.01)
CPC G06F 3/016 (2013.01) [C03B 23/20 (2013.01); C03C 15/00 (2013.01); F16K 15/023 (2013.01); F16K 27/102 (2013.01); F16K 99/0005 (2013.01); F16K 99/0059 (2013.01); F16K 2099/0074 (2013.01); F16K 2099/008 (2013.01); G02B 2027/0192 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A device, comprising:
two or more stacked and bonded layers of a rigid body material forming a body, the body comprising:
a chamber;
a fluidic gate, a fluidic source, and a fluidic drain, each configured to be in fluid communication with the chamber; and
a gate transmission element slidably disposed within the chamber, wherein the fluidic gate is disposed within a first layer of the rigid body material, the gate transmission element is disposed entirely within a second layer of the rigid body material, and the fluidic source and the fluidic drain are each disposed within a third layer of the rigid body material, the second layer of the rigid body material being located between the first layer of the rigid body material and the third layer of the rigid body material.