US 12,228,905 B2
Eco-efficiency monitoring and exploration platform for semiconductor manufacturing
Ala Moradian, San Jose, CA (US); Umesh Madhav Kelkar, Cupertino, CA (US); Elizabeth Neville, Sunnyvale, CA (US); Orlando Trejo, Santa Clara, CA (US); Sergey Meirovich, Austin, TX (US); Kartik B. Shah, Saratoga, CA (US); and Shreyas Suresh Kher, Campbell, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Dec. 10, 2021, as Appl. No. 17/548,334.
Prior Publication US 2023/0185268 A1, Jun. 15, 2023
Int. Cl. G05B 19/18 (2006.01); G05B 19/406 (2006.01)
CPC G05B 19/188 (2013.01) [G05B 19/406 (2013.01); G05B 2219/32128 (2013.01); G05B 2219/45031 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method, comprising:
receiving, by a processing device, first data indicating an update to a substrate fabrication system comprising a first configuration of manufacturing equipment and operating according to one or more process procedures, wherein the update comprises at least one of:
i.) an alteration of a first scheduled operational mode of a support asset of the substrate fabrication system to a shared operational mode;
or
ii.) a modification of a first gas to a second gas to be used by the substrate fabrication system;
inputting, by the processing device, the first data and process data associated with the one or more process procedures into a digital replica configured to estimate environmental resource usage data indicative of an amount of one or more resources consumed, wherein the digital replica comprises a digital reproduction of the substrate fabrication system, and wherein the digital replica is further configured to estimate the environmental resource usage data based at least in part on processing the first data and the process data using one or more of a multivariate statistical analysis or a mechanistic analysis of the substrate fabrication system in view of the update;
receiving, by the processing device, estimated environmental resource usage data output from the digital replica, wherein the estimated environmental resource usage data indicates estimated environmental resource consumption corresponding to performing the one or more process procedures by the substrate fabrication system incorporating the update; and
providing, by the processing device, the estimated environmental resource usage data for display on a graphical user interface (GUI).