| CPC G01R 31/311 (2013.01) [G01J 3/0237 (2013.01); G01J 3/027 (2013.01); G01J 3/0275 (2013.01); G01J 3/108 (2013.01); G01R 31/2656 (2013.01); G01R 31/2894 (2013.01); G01R 31/2896 (2013.01); G01J 2003/106 (2013.01)] | 12 Claims |
|
1. A method of testing a semiconductor device, comprising:
providing an illuminator system comprising,
a rotary plate,
a first light source mounted on the rotary plate,
a second light source mounted on the rotary plate,
a controller configured to rotate the rotary plate, and
a light output aligned to the first light source;
illuminating a first semiconductor package using the first light source, wherein a first photosensitive circuit of the first semiconductor package converts a first optical signal from the first light source into a first electrical signal;
analyzing the first electrical signal to confirm proper operation of the first photosensitive circuit;
rotating the rotary plate until the second light source is aligned to the light output after illuminating the first semiconductor package using the first light source; and
illuminating a second semiconductor package using the second light source after rotating the rotary plate.
|