US 12,228,608 B2
Probe station capable of maintaining stable and accurate contact to device under test
Yi-Kai Chao, New Taipei (TW)
Assigned to NANYA TECHNOLOGY CORPORATION, New Taipei (TW)
Filed by NANYA TECHNOLOGY CORPORATION, New Taipei (TW)
Filed on Feb. 18, 2024, as Appl. No. 18/444,745.
Application 18/444,745 is a continuation of application No. 17/805,027, filed on Jun. 1, 2022, granted, now 11,940,486.
Prior Publication US 2024/0230754 A1, Jul. 11, 2024
This patent is subject to a terminal disclaimer.
Int. Cl. G01R 31/28 (2006.01)
CPC G01R 31/2889 (2013.01) [G01R 31/2865 (2013.01); G01R 31/2868 (2013.01)] 16 Claims
OG exemplary drawing
 
1. A probe station capable of maintaining stable and accurate contact to a device under test, the probe station comprising:
a frame defining an accommodation space;
a platform connected with the frame, the platform having an opening communicated with the accommodation space;
a testing equipment at least partially disposed in the accommodation space, the testing equipment comprising:
a main body having a first side and a second side opposite to the first side; and
a load board connected with the first side and configured to support the device under test, the opening exposing the load board and allowing the device under test to pass through;
a probe holder disposed on the platform;
at least one probe held by the probe holder, the probe holder being configured to control the probe to contact with the device under test; and
a plurality of connecting assemblies, each of the connecting assemblies comprising:
two first buffering pieces connected between the first side and the platform; and
a second buffering piece connected between the second side and the frame, an arrangement of the first buffering pieces and the second buffering piece forms a triangle.