US 12,228,569 B2
Biosensor
Jin Tae Kim, Daejeon (KR)
Assigned to ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE, Daejeon (KR)
Filed by ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE, Daejeon (KR)
Filed on Sep. 1, 2021, as Appl. No. 17/464,336.
Claims priority of application No. 10-2021-0010693 (KR), filed on Jan. 26, 2021.
Prior Publication US 2022/0236262 A1, Jul. 28, 2022
Int. Cl. G01N 33/543 (2006.01); G01N 21/47 (2006.01); G01N 21/64 (2006.01); H01L 33/00 (2010.01); H01L 33/30 (2010.01)
CPC G01N 33/54373 (2013.01) [G01N 21/4788 (2013.01); G01N 21/6428 (2013.01); H01L 33/0025 (2013.01); H01L 33/30 (2013.01)] 16 Claims
OG exemplary drawing
 
1. A biosensor comprising:
a substrate;
an optical structure provided on the substrate and including a plurality of nanoholes; and
a cover provided on the substrate and having a bridge shape that is in contact with a top surface of the substrate at both sides of the optical structure,
wherein the cover has a channel extending in a first direction,
the optical structure is provided inside the channel,
the optical structure is configured to capture biomaterials that travel through the channel,
the channel has an inlet opening and an outlet opening exposing both sides of the optical structure to outside of the channel,
each of the inlet opening and the outlet opening has a height greater than that of the optical structure, and
a diameter and a period of each of the nanoholes decrease in the first direction from one end of the optical structure toward a central portion of the optical structure and increase in the first direction from the central portion toward the other end of the optical structure, which faces the one end.