| CPC G01N 27/225 (2013.01) [G01N 27/228 (2013.01)] | 34 Claims |
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1. A device comprising:
a first patterned metal layer;
a first dielectric layer disposed over the first patterned metal layer;
a second patterned metal layer disposed over the first dielectric layer, wherein the first patterned metal layer, the first dielectric layer, and the second patterned metal layer form a first capacitor;
a second moisture-sensitive dielectric layer disposed over the second patterned metal layer; and
a third patterned metal layer disposed over the second moisture-sensitive dielectric layer, wherein
the third patterned metal layer, the second moisture-sensitive dielectric layer, and the second patterned metal layer form a second capacitor,
the second patterned metal layer is shared with the first capacitor, and
the first patterned metal layer is further configured for connection to electrical power as a heating element to assist in removing moisture from the second moisture-sensitive dielectric layer of the second capacitor.
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