US 12,228,527 B2
Inspection device
Hiroyuki Murata, Tokyo (JP); Atsushi Kitabatake, Tokyo (JP); and Yuichiro Yoshida, Tokyo (JP)
Assigned to SAKI CORPORATION, Tokyo (JP)
Appl. No. 17/919,282
Filed by SAKI CORPORATION, Tokyo (JP)
PCT Filed Apr. 1, 2021, PCT No. PCT/JP2021/014136
§ 371(c)(1), (2) Date Oct. 17, 2022,
PCT Pub. No. WO2021/215217, PCT Pub. Date Oct. 28, 2021.
Claims priority of application No. 2020-075927 (JP), filed on Apr. 22, 2020.
Prior Publication US 2023/0175985 A1, Jun. 8, 2023
Int. Cl. G01N 23/044 (2018.01); G01N 23/083 (2018.01)
CPC G01N 23/044 (2018.02) [G01N 23/083 (2013.01); G01N 2223/33 (2013.01); G01N 2223/611 (2013.01)] 4 Claims
OG exemplary drawing
 
1. An inspection device comprising:
a radiation source;
a holding unit that holds an inspection object;
a detector that detects a radiation radiated from the radiation source and passing through the inspection object to acquire an image of the inspection object;
a driving unit that changes relative positions between the radiation source, and the holding unit and the detector;
a position detection unit that detects information regarding positions of the holding unit and the detector; and
a control unit,
at each of a plurality of imaging timings in a state where the relative positions between the radiation source, and the holding unit and the detector are changed by the driving unit, the inspection device executing:
a step of the control unit transmitting an imaging start signal for causing the detector to start acquisition of the image;
a step of the detector receiving the imaging start signal and starting acquisition of the image and transmitting a response signal indicating start of imaging to the control unit;
a step of the control unit receiving the response signal and acquiring information regarding the positions of the holding unit and the detector from the position detection unit; and
a step of the control unit storing the image acquired by the detector and the information regarding the positions in association with each other.