US 12,228,526 B2
Focusing grating devices with large aspect ratio
Thomas Koehler, Norderstedt (DE); and Gereon Vogtmeier, Aachen (DE)
Assigned to KONINKLIJKE PHILIPS N.V., Eindhoven (NL)
Appl. No. 17/916,167
Filed by KONINKLIJKE PHILIPS N.V., Eindhoven (NL)
PCT Filed Mar. 25, 2021, PCT No. PCT/EP2021/057673
§ 371(c)(1), (2) Date Sep. 30, 2022,
PCT Pub. No. WO2021/197990, PCT Pub. Date Oct. 7, 2021.
Claims priority of application No. 20167480 (EP), filed on Apr. 1, 2020.
Prior Publication US 2023/0221264 A1, Jul. 13, 2023
Int. Cl. G01N 23/041 (2018.01); G21K 1/02 (2006.01); G21K 1/06 (2006.01)
CPC G01N 23/041 (2018.02) [G21K 1/025 (2013.01); G21K 1/06 (2013.01); G21K 2201/067 (2013.01); G21K 2207/005 (2013.01)] 12 Claims
OG exemplary drawing
 
1. A focusing grating device for focusing in a first focusing direction and a second focusing direction for an X-ray radiation beam, the first focusing direction being different from the second focusing direction, the focusing grating device comprising:
a stack comprising a substrate and a resist layer;
wherein the stack is bent in the first focusing direction;
wherein a lithographic process on the stack is performed while the substrate is bent in the first focusing direction;
wherein a grating material is electroplated to form grating features;
wherein the bending of the stack is substantially reversed, and
wherein after said reversing the bending, a further bending of the stack is applied to induce the second focusing direction.