US 12,228,515 B2
Inspection apparatus and inspection method
Tomonori Nakamura, Hamamatsu (JP)
Assigned to HAMAMATSU PHOTONICS K.K., Hamamatsu (JP)
Appl. No. 17/441,712
Filed by HAMAMATSU PHOTONICS K.K., Hamamatsu (JP)
PCT Filed Jan. 29, 2020, PCT No. PCT/JP2020/003249
§ 371(c)(1), (2) Date Sep. 22, 2021,
PCT Pub. No. WO2020/195137, PCT Pub. Date Oct. 1, 2020.
Claims priority of application No. 2019-062983 (JP), filed on Mar. 28, 2019.
Prior Publication US 2022/0196551 A1, Jun. 23, 2022
Int. Cl. G01N 21/64 (2006.01); G06T 7/00 (2017.01)
CPC G01N 21/643 (2013.01) [G01N 21/6456 (2013.01); G06T 7/0004 (2013.01); G01N 21/6489 (2013.01); G06T 2207/30148 (2013.01)] 10 Claims
OG exemplary drawing
 
1. A method of inspecting an object in which a plurality of light-emitting elements including a first light-emitting element and a second light-emitting element arranged around the first light-emitting element is formed, the method comprising:
irradiating the object with excitation light;
imaging fluorescence from the object;
calculating a relative luminance of fluorescence from the first light-emitting element based on the fluorescence from the first light-emitting element and fluorescence from the second light-emitting element imaged; and
determining a quality of the first light-emitting element by comparing a calculated value based on an absolute luminance and the relative luminance of the fluorescence from the first light-emitting element with a predetermined threshold value.