| CPC G01N 21/61 (2013.01) [G01N 21/031 (2013.01); G01N 21/05 (2013.01); G01N 2021/058 (2013.01)] | 35 Claims |

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1. An integrated device for fluid analysis, comprising:
a substrate;
a die comprising a gas cell, the gas cell comprising:
a bottom surface and sidewalls formed in the substrate;
at least one gas inlet and at least one gas outlet coupled for injection of a fluid into and out of the gas cell, respectively;
an optical input and an optical output, each optically coupled to direct light into and out of the gas cell, respectively, wherein the light is guided in the gas cell by the sidewalls and the bottom surface of the gas cell; and
a capping layer bonded to the substrate to seal the gas cell, the capping layer comprising an interior surface forming a top surface of the gas cell, wherein the light is guided in the gas cell further by the top surface of the gas cell.
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