US 12,228,510 B2
Integrated device for fluid analysis
Yasser M. Sabry, Cairo (EG); Alaa Fathy, Cairo (EG); Diaa Abdelmaguid Khalil, Cairo (EG); Tarik Bourouina, Cairo (EG); and Bassam A. Saadany, Cairo (EG)
Assigned to SI-WARE SYSTEMS, Cairo (EG)
Filed by Si-Ware Systems, Cairo (EG)
Filed on May 27, 2020, as Appl. No. 16/885,186.
Claims priority of provisional application 62/853,671, filed on May 28, 2019.
Prior Publication US 2020/0378892 A1, Dec. 3, 2020
Int. Cl. G01N 21/61 (2006.01); G01N 21/03 (2006.01); G01N 21/05 (2006.01)
CPC G01N 21/61 (2013.01) [G01N 21/031 (2013.01); G01N 21/05 (2013.01); G01N 2021/058 (2013.01)] 35 Claims
OG exemplary drawing
 
1. An integrated device for fluid analysis, comprising:
a substrate;
a die comprising a gas cell, the gas cell comprising:
a bottom surface and sidewalls formed in the substrate;
at least one gas inlet and at least one gas outlet coupled for injection of a fluid into and out of the gas cell, respectively;
an optical input and an optical output, each optically coupled to direct light into and out of the gas cell, respectively, wherein the light is guided in the gas cell by the sidewalls and the bottom surface of the gas cell; and
a capping layer bonded to the substrate to seal the gas cell, the capping layer comprising an interior surface forming a top surface of the gas cell, wherein the light is guided in the gas cell further by the top surface of the gas cell.