US 12,228,484 B2
Broad ion beam (BIB) systems for more efficient processing of multiple samples
Michal Hrouzek, Brno (CZ); Krishna Kanth Neelisetty, Brno (CZ); Petr Wandrol, Brno (CZ); and Libor Novak, Brno (CZ)
Assigned to FEI Company, Hillsboro, OR (US)
Filed by FEI Company, Hillsboro, OR (US)
Filed on May 19, 2022, as Appl. No. 17/748,878.
Prior Publication US 2023/0375445 A1, Nov. 23, 2023
Int. Cl. H01J 37/305 (2006.01); G01N 1/28 (2006.01); G01N 1/32 (2006.01); H01J 37/20 (2006.01)
CPC G01N 1/32 (2013.01) [G01N 1/286 (2013.01); H01J 37/20 (2013.01); H01J 37/3056 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A broad ion beam (BIB) sample preparation system having improved uptime, the BIB sample preparation system comprising:
a housing defining an interior volume;
a sample stage positioned within the interior volume, wherein the sample stage is configured to hold a sample holder during polishing of a sample held by the sample holder;
a first BIB source configured to emit a first broad ion beam towards the sample when in use, wherein the first BIB source is positioned within a first source housing; and
a second BIB source configured to emit a second broad ion beam towards the sample when in use, wherein the second BIB source is positioned within a second source housing, wherein the second BIB source is configured to be removed while the first BIB source is emitting the first broad ion beam toward the sample.