US 12,228,450 B2
Apparatus for carrying out polarization resolved Raman spectroscopy
Oleksii Ilchenko, Kongens Lyngby (DK); Anja Boisen, Kongens Lyngby (DK); Yurii Pilhun, Kongens Lyngby (DK); Andrii Kutsyk, Kongens Lyngby (DK); and Florian Bachmann, Køge (DK)
Assigned to Danmarks Tekniske Universitet; Xnovo Technology ApS, Køge (DK)
Appl. No. 17/756,594
Filed by Danmarks Tekniske Universitet, Kongens Lyngby (DK); and Xnovo Technology ApS, Køge (DK)
PCT Filed Dec. 4, 2020, PCT No. PCT/EP2020/084700
§ 371(c)(1), (2) Date May 27, 2022,
PCT Pub. No. WO2021/110949, PCT Pub. Date Jun. 10, 2021.
Claims priority of application No. 19213597 (EP), filed on Dec. 4, 2019; and application No. 19213599 (EP), filed on Dec. 4, 2019.
Prior Publication US 2023/0003576 A1, Jan. 5, 2023
Int. Cl. G01J 3/02 (2006.01); G01J 3/28 (2006.01); G01J 3/44 (2006.01); G01N 21/21 (2006.01); G01N 21/65 (2006.01)
CPC G01J 3/0224 (2013.01) [G01J 3/0208 (2013.01); G01J 3/2803 (2013.01); G01J 3/44 (2013.01); G01N 21/65 (2013.01); G01N 2021/216 (2013.01)] 13 Claims
OG exemplary drawing
 
1. An apparatus for carrying out polarization resolved Raman spectroscopy on a crystalline or polycrystalline sample, the apparatus comprising:
at least one laser, configured to provide excitation radiation to a surface of the sample, and
an optical system which is configured to collect at least one off-axis Raman beam from Raman light scattered by the sample in response to exposing the surface to the excitation radiation,
the at least one off-axis Raman beam being scattered from the sample in a direction that is inclined with regard to an optical axis of an objective of the optical system for collecting the at least one off-axis Raman beam,
wherein the optical system comprises at least one polarizer device for generating at least one polarized off-axis Raman beam from the at least one off-axis Raman beam,
the optical system comprises at least one spectrometer for generating an optical spectrum from the at least one polarized off-axis Raman beam,
wherein the at least one off-axis Raman beam travels along a propagation direction in the optical system which is offset from a central optical axis of the polarizer device, and
wherein an at least one on-axis Raman beam is collected or collectable in addition to the at least one off-axis Raman beam.