US 12,228,427 B2
Resistive differential alignment monitor
Josef Muenz, Munich (DE)
Assigned to TEXAS INSTRUMENTS INCORPORATED, Dallas, TX (US)
Filed by Texas Instruments Incorporated, Dallas, TX (US)
Filed on Apr. 28, 2022, as Appl. No. 17/731,506.
Prior Publication US 2023/0349729 A1, Nov. 2, 2023
Int. Cl. G01D 5/165 (2006.01); H01C 10/46 (2006.01)
CPC G01D 5/1655 (2013.01) [H01C 10/46 (2013.01)] 28 Claims
OG exemplary drawing
 
1. A microelectronic device, comprising:
a resistive differential alignment monitor (RDAM), including:
a first resistor, including a first wide portion and a first narrow portion;
a first connector contacting the first wide portion;
a second connector contacting the first narrow portion;
a second resistor, including a second wide portion and a second narrow portion;
a third connector contacting the second wide portion; and
a fourth connector contacting the second narrow portion;
wherein:
a first width of the first wide portion adjacent to the first connector is greater than a second width of the first narrow portion adjacent to the second connector;
the first connector is separated from the second connector in a first direction by a first length;
the second wide portion adjacent to the third connector has the first width;
the second narrow portion adjacent to the fourth connector has the second width; and
the third connector is separated from the fourth connector in a second direction, anti-parallel to the first direction, by the first length.