US 12,228,404 B2
Drive and sense balanced, semi-coupled 3-axis gyroscope
Doruk Senkal, San Jose, CA (US); Robert Hennessy, San Jose, CA (US); Houri Johari-Galle, San Jose, CA (US); and Joseph Seeger, Menlo Park, CA (US)
Assigned to INVENSENSE, INC., San Jose, CA (US)
Filed by INVENSENSE, INC., San Jose, CA (US)
Filed on Jun. 13, 2023, as Appl. No. 18/333,821.
Application 18/333,821 is a division of application No. 17/138,392, filed on Dec. 30, 2020, granted, now 11,815,354.
Application 17/138,392 is a division of application No. 15/940,810, filed on Mar. 29, 2018, granted, now 10,914,584.
Application 15/940,810 is a continuation in part of application No. 15/865,189, filed on Jan. 8, 2018, abandoned.
Application 15/865,189 is a continuation of application No. 14/678,774, filed on Apr. 3, 2015, granted, now 9,863,769.
Application 14/678,774 is a continuation in part of application No. 14/472,143, filed on Aug. 28, 2014, granted, now 9,395,183.
Application 14/678,774 is a continuation in part of application No. 14/041,810, filed on Sep. 30, 2013, granted, now 9,170,107.
Application 14/472,143 is a continuation of application No. 13/235,296, filed on Sep. 16, 2011.
Claims priority of provisional application 62/529,401, filed on Jul. 6, 2017.
Claims priority of provisional application 62/001,474, filed on May 21, 2014.
Prior Publication US 2023/0324176 A1, Oct. 12, 2023
Int. Cl. G01C 19/5712 (2012.01); G01C 19/5747 (2012.01); G01C 19/5762 (2012.01)
CPC G01C 19/5712 (2013.01) [G01C 19/5747 (2013.01); G01C 19/5762 (2013.01)] 12 Claims
OG exemplary drawing
 
1. A method, comprising:
transducing a first component of angular velocity associated with motion of a microelectromechanical systems (MEMS) device around a first axis with at least one frame gyroscope; and
transducing a second component of angular velocity associated with motion of the MEMS device around a second axis with at least two proof masses, wherein the first axis and the second axis are orthogonal, and wherein the at least two proof masses are driven into oscillation via at least two drive shuttles coupled to the at least one frame gyroscope, and wherein the at least two drive shuttles are configured to be constrained to a motion associated with the at least two drive shuttles in a plane defined by the at least two drive shuttles.