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1. A method for positioning a substrate on a substrate support, comprising: obtaining a plurality of backside pressure values corresponding to a plurality of different substrate positions on a substrate support, by: placing a substrate in a position on the substrate support; vacuum chucking the substrate to the substrate support; measuring a backside pressure of the substrate; and repeatedly placing the substrate, vacuum chucking the substrate, and measuring the backside pressure of the substrate at the plurality of different substrate positions such that the plurality of backside pressure values decrease in backside pressure values to an absolute minimum pressure value and then increase in backside pressure values, or such that the plurality of backside pressure values increase in backside pressure values to an absolute maximum pressure value and then decrease in backside pressure values; and analyzing the plurality of backside pressure values to determine a calibrated substrate position, wherein the calibrated substrate position is associated with a backside pressure value that is at the absolute minimum pressure value or at the absolute maximum pressure value.
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