US 12,227,845 B2
Vapor deposition device capable of reciprocating rotation and lifting
Weicong Song, Shanghai (CN); and Wenjun Xie, Shanghai (CN)
Assigned to Betone Technology Shanghai, Inc., Shanghai (CN)
Appl. No. 18/699,313
Filed by Betone Technology Shanghai, Inc., Shanghai (CN)
PCT Filed Sep. 22, 2022, PCT No. PCT/CN2022/120468
§ 371(c)(1), (2) Date Apr. 8, 2024,
PCT Pub. No. WO2023/082855, PCT Pub. Date May 19, 2023.
Claims priority of application No. 202111330341.1 (CN), filed on Nov. 11, 2021.
Prior Publication US 2024/0327987 A1, Oct. 3, 2024
Int. Cl. C23C 16/458 (2006.01); C23C 14/50 (2006.01)
CPC C23C 16/4584 (2013.01) [C23C 14/505 (2013.01); C23C 16/4586 (2013.01)] 17 Claims
OG exemplary drawing
 
1. A vapor deposition device capable of reciprocating rotation and lifting, including:
a vapor deposition cavity, wherein a rotation through hole is formed on a bottom of the vapor deposition cavity;
a base, including a base station and a base shaft, wherein the base station is located in the vapor deposition cavity, the base shaft is located below the base station and is fixedly connected with the base station, and a bottom end of the base shaft passes through the rotation through hole to extend out of the vapor deposition cavity;
a telescopic assembly, including a telescopic tubular member and a driving ring, wherein the telescopic tubular member is sleeved around the base shaft and is located inside the vapor deposition cavity, a top end of the telescopic tubular member is fixedly connected with the base station, and a bottom end of the telescopic tubular member is fixedly connected with the driving ring; wherein the telescopic tubular member includes corrugated pipes;
a passive lifting rotation member having a ring-shaped structure, sleeved around the base shaft and fixedly connected to the base shaft, configured to move along with the base shaft;
a rotation mechanism, fixedly connected with the telescopic assembly, and configured to drive the telescopic assembly to perform a reciprocating rotational motion, which in turn drives the base station, the base shaft, and the passive lifting rotation member to perform a reciprocating rotational motion; wherein
the rotation mechanism includes an active rotation assembly and a passive rotation assembly, the passive rotation assembly is fixedly connected with the driving ring, and the active rotation assembly drives the passive rotation assembly to perform a reciprocating rotational motion through magnetic force;
the active rotation assembly includes an active rotation block and at least one active magnet, and the at least one active magnet is disposed on a surface of the active rotation block facing the passive rotation assembly; wherein the passive rotation assembly includes a passive rotation block and at least one passive magnet, and the at least one passive magnet is disposed on a surface of the passive rotation block facing the active rotation assembly; and
the passive rotation assembly further includes a first passive rotation connector located inside the rotation through hole, the first passive rotation connector is fixedly connected to a top end of the passive rotation block and a side surface of the driving ring; and
a lifting mechanism, rotatably and slidably connected with the passive lifting rotation member, and configured to drive the passive lifting rotation member to move up and down, which in turn drives the base shaft and the base station to move up and down; wherein the telescopic assembly extends when the base station ascends and shortens when the base station descends.