US 12,227,844 B2
Chemical vapor deposition device capable of reciprocating rotation and lifting
Xiaoliang Jin, Shanghai (CN); Xueqin Pan, Shanghai (CN); and Weicong Song, Shanghai (CN)
Assigned to Betone Technology Shanghai, Inc., Shanghai (CN)
Appl. No. 18/699,311
Filed by Betone Technology Shanghai, Inc., Shanghai (CN)
PCT Filed Sep. 22, 2022, PCT No. PCT/CN2022/120432
§ 371(c)(1), (2) Date Apr. 8, 2024,
PCT Pub. No. WO2023/082853, PCT Pub. Date May 19, 2023.
Claims priority of application No. 202111330342.6 (CN), filed on Nov. 11, 2021.
Prior Publication US 2024/0327986 A1, Oct. 3, 2024
Int. Cl. C23C 16/458 (2006.01)
CPC C23C 16/4584 (2013.01) [C23C 16/4586 (2013.01)] 7 Claims
OG exemplary drawing
 
1. A chemical vapor deposition device capable of reciprocating rotation and lifting, including:
a cavity, provided with a through hole on a bottom of the cavity;
a base, including a base station and a base shaft, wherein the base station is located in the cavity, the base shaft is located below the base station and fixedly connected with the base station, and a bottom end of the base shaft passes through the through hole to extend out of the cavity;
a fixing bracket, located below the cavity and fixedly connected with the bottom of the cavity;
a lifting mechanism, located below the cavity and connected with the fixing bracket, wherein the lifting mechanism includes a lifting bracket; and
a rotation mechanism, configured to be located below the cavity and include a stator, a rotor, a driven piece, a connector, and a telescopic tubular assembly; wherein the stator is fixedly connected with the lifting bracket and sleeved on a periphery of the rotor to drive the rotor to rotate with the base shaft as a rotation axis; wherein the driven piece is located above the rotor and fixedly connected with the rotor, and the driven piece is sleeved on a periphery of the base shaft and fixedly connected with the base shaft; wherein the telescopic tubular assembly is located above the driven piece and sleeved on the periphery of the base shaft, a top of the telescopic tubular assembly is hermetically connected with the bottom of the cavity, and a bottom of the telescopic tubular assembly is hermetically connected with a top of the connector;
wherein the lifting mechanism further includes a driving motor, a reducer, a threaded rod and a threaded block; wherein the driving motor, the reducer and the threaded rod are sequentially connected from bottom to top; wherein the reducer is fixedly connected with the fixing bracket, the threaded rod is driven by the reducer to rotate, and the threaded block is sleeved on a periphery of the threaded rod and is configured to move up or down along with the rotation of the threaded rod; wherein a side surface of the fixing bracket is provided with a guide-rail groove, a first side of the threaded block is embedded into the guide-rail groove, and a second side of the threaded block is fixedly connected with the lifting bracket to drive the lifting bracket to move up or down;
wherein the fixing bracket includes a supporting portion and a guide-rail block; wherein a top end of the supporting portion is fixedly connected with the bottom of the cavity, and the guide-rail block is located at a side surface of the supporting portion and fixedly connected with the supporting portion; wherein a top end of the reducer is fixedly connected with a bottom end of the guide-rail block, and the guide-rail groove is open from a side of the guide-rail block away from the supporting portion.