US 12,227,842 B2
Vapor accumulator for corrosive gases with purging
Gary Bridger Lind, Penn Valley, CA (US); Panya Wongsenakhum, Santa Clara, CA (US); Joshua Collins, Sunnyvale, CA (US); and Harald te Nijenhuis, San Jose, CA (US)
Assigned to Lam Research Corporation, Fremont, CA (US)
Appl. No. 17/595,504
Filed by Lam Research Corporation, Fremont, CA (US)
PCT Filed May 19, 2020, PCT No. PCT/US2020/033653
§ 371(c)(1), (2) Date Nov. 18, 2021,
PCT Pub. No. WO2020/236844, PCT Pub. Date Nov. 26, 2020.
Claims priority of provisional application 62/851,462, filed on May 22, 2019.
Prior Publication US 2022/0213599 A1, Jul. 7, 2022
Int. Cl. C23C 16/448 (2006.01); C23C 16/455 (2006.01); C23C 16/52 (2006.01)
CPC C23C 16/45544 (2013.01) [C23C 16/448 (2013.01); C23C 16/45561 (2013.01); C23C 16/52 (2013.01)] 22 Claims
OG exemplary drawing
 
2. An apparatus, comprising:
a bell jar having a bottom opening and one or more flange structures arranged around the bottom opening and extending radially outward therefrom;
a plate, wherein:
the plate has a first side and a second side opposite the first side,
the bell jar is positioned with the bottom opening adjacent to the first side, and
the plate includes one or more fluidic seal interfaces, each fluidic seal interface including at least one purge gas outlet located on the second side of the plate and fluidically connected, by a corresponding purge gas passage located within the plate, with a corresponding purge gas inlet located on the first side of the plate;
one or more clamping structures having a bottom surface proximate to the first side of the plate and an interior flange extending radially inward therefrom and proximate to the one or more flange structures;
a perimeter plenum volume defined, at least in part, by:
a portion of the first side of the plate, a portion of each of the one or more clamping structures, and
at least a portion of each of the one or more flange structures; and
one or more purge gallery grooves located in one or more items selected from the group consisting of: the plate and the one or more clamping structures, wherein the one or more purge gallery grooves are fluidically connected with the perimeter plenum volume and with each purge gas inlet within the apparatus.