US 12,227,839 B2
Sealing article comprising metal coating, method of making and method of using the same
Peng-Cheng Hong, Taichung (TW); Jun-Liang Pu, Hsin-Chu (TW); W. L. Hsu, Hsin-Chu (TW); Chung-Hao Kao, Hsin-Chu (TW); Chia-Chun Hung, Taichung (TW); Cheng-Yi Wu, Taichung (TW); and Chin-Szu Lee, Taoyuan (TW)
Assigned to Taiwan Semiconductor Manufacturing Co., Ltd., Hsin-Chu (TW)
Filed by Taiwan Semiconductor Manufacturing Co., Ltd., Hsin-Chu (TW)
Filed on Nov. 17, 2023, as Appl. No. 18/513,448.
Application 18/513,448 is a division of application No. 15/801,497, filed on Nov. 2, 2017, granted, now 11,851,754.
Claims priority of provisional application 62/564,564, filed on Sep. 28, 2017.
Prior Publication US 2024/0084447 A1, Mar. 14, 2024
Int. Cl. C23C 16/44 (2006.01); B29D 99/00 (2010.01); B29K 19/00 (2006.01); C23C 14/02 (2006.01); C23C 14/20 (2006.01); C23C 14/34 (2006.01); C23C 18/18 (2006.01); C23C 18/20 (2006.01); C23C 18/24 (2006.01); C23C 18/28 (2006.01); C23C 18/30 (2006.01); C25D 5/56 (2006.01); C25D 7/04 (2006.01); H01J 37/32 (2006.01)
CPC C23C 16/4409 (2013.01) [B29D 99/0053 (2013.01); C23C 14/021 (2013.01); C23C 14/205 (2013.01); C23C 14/34 (2013.01); C23C 18/1875 (2013.01); C25D 7/04 (2013.01); H01J 37/32513 (2013.01); B29K 2019/00 (2013.01); C23C 18/2086 (2013.01); C23C 18/24 (2013.01); C23C 18/285 (2013.01); C23C 18/30 (2013.01); C25D 5/56 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method of using a sealing article, comprising step of:
installing the sealing article in a semiconductor processing chamber,
wherein the sealing article comprises a body comprising a polymeric elastomer, and a coating layer disposed on a top surface of the body, the coating layer comprising at least one metal, and wherein the body has a whole cross-section in a semi-circular or semi-elliptical shape, the top surface of the body is a flat surface, and the coating layer is a layer disposed on the flat surface of the body only.