US 12,227,833 B2
Preparation device and preparation method for alloy targets
Guangyu Jiang, Shanghai (CN); Chunsheng Cheng, Shanghai (CN); and Yue Zhao, Shanghai (CN)
Assigned to Supermag Technology (Shanghai) Co., Ltd., Shanghai (CN)
Filed by Supermag Technology (Shanghai) Co., Ltd., Shanghai (CN)
Filed on Dec. 20, 2023, as Appl. No. 18/389,845.
Claims priority of application No. 202310488835.5 (CN), filed on Apr. 28, 2023.
Prior Publication US 2024/0360544 A1, Oct. 31, 2024
Int. Cl. C23C 14/34 (2006.01); B22F 10/28 (2021.01); B22F 12/41 (2021.01); B22F 12/53 (2021.01); B22F 12/55 (2021.01); B22F 12/90 (2021.01); B33Y 10/00 (2015.01); B33Y 30/00 (2015.01); B33Y 40/00 (2020.01); B33Y 80/00 (2015.01); C23C 24/08 (2006.01)
CPC C23C 14/3414 (2013.01) [B22F 10/28 (2021.01); B22F 12/41 (2021.01); B22F 12/53 (2021.01); B22F 12/55 (2021.01); B22F 12/90 (2021.01); B33Y 10/00 (2014.12); B33Y 30/00 (2014.12); B33Y 40/00 (2014.12); B33Y 80/00 (2014.12); C23C 24/087 (2013.01); B22F 2301/056 (2013.01); B22F 2301/10 (2013.01); B22F 2998/10 (2013.01)] 3 Claims
OG exemplary drawing
 
1. A preparation device for an alloy target, comprising a material nozzle, a laser, and a target support substrate;
wherein the material nozzle is arranged above the target support substrate, the material nozzle is configured to spray material powder required for an alloy target to be prepared, and an injection efficiency of the material nozzle is 0-100 mm3/s; the laser is arranged above the target support substrate to generate a laser beam;
the target support substrate supports a target coating formed by the material powder and controls size and shape of the target coating; and
the target coating is configured to be removable from the target support substrate.