US 12,227,832 B2
Deposition apparatus and methods
Brian T. Hazel, Avon, CT (US); Michael J. Maloney, Marlborough, CT (US); James W. Neal, Jupiter, FL (US); and David A. Litton, West Hartford, CT (US)
Assigned to RTX Corporation, Farmington, CT (US)
Filed by RTX Corporation, Farmington, CT (US)
Filed on Aug. 14, 2023, as Appl. No. 18/233,582.
Application 17/844,199 is a division of application No. 16/527,250, filed on Jul. 31, 2019, granted, now 11,365,473, issued on Jun. 21, 2022.
Application 16/527,250 is a division of application No. 14/774,489, granted, now 10,385,444, issued on Aug. 20, 2019, previously published as PCT/US2014/028489, filed on Mar. 14, 2014.
Application 18/233,582 is a continuation of application No. 17/844,199, filed on Jun. 20, 2022, granted, now 11,725,269.
Claims priority of provisional application 61/800,727, filed on Mar. 15, 2013.
Prior Publication US 2024/0052476 A1, Feb. 15, 2024
This patent is subject to a terminal disclaimer.
Int. Cl. C23C 14/30 (2006.01); C23C 14/22 (2006.01); C23C 14/24 (2006.01); C23C 14/50 (2006.01)
CPC C23C 14/30 (2013.01) [C23C 14/228 (2013.01); C23C 14/243 (2013.01); C23C 14/246 (2013.01); C23C 14/505 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A deposition apparatus (20) comprising:
a chamber (22);
a process gas source (62) coupled to the chamber;
a vacuum pump (52) coupled to the chamber;
at least two electron guns (26);
one or more power supplies (30) coupled to the electron guns;
a plurality of crucibles (32,33,34) positioned or positionable in an operative position within a field of view of at least one said electron gun; and
a part holder (170) having at least one operative position for holding parts spaced above the crucibles by a standoff height H,
wherein:
the plurality of crucibles comprises a row of three crucibles; and
the standoff height H is adjustable in a range including at least a standoff height of 22 inches.