US 12,227,831 B2
Pneumatic shutters to control organic vapor jet printing
Stephen R. Forrest, Ann Arbor, MI (US); and Jeffrey A. Horowitz, Ann Arbor, MI (US)
Assigned to The Regents of the University of Michigan, Innovation Partnerships, Ann Arbor, MI (US)
Filed by The Regents of the University of Michigan, Ann Arbor, MI (US)
Filed on Apr. 20, 2021, as Appl. No. 17/235,232.
Claims priority of provisional application 63/018,719, filed on May 1, 2020.
Prior Publication US 2021/0343941 A1, Nov. 4, 2021
Int. Cl. H01L 51/00 (2006.01); B05D 1/02 (2006.01); C23C 14/12 (2006.01); C23C 14/22 (2006.01); C23C 16/00 (2006.01); C23C 14/04 (2006.01); H10K 71/00 (2023.01)
CPC C23C 14/228 (2013.01) [B05D 1/02 (2013.01); C23C 14/12 (2013.01); C23C 16/00 (2013.01); C23C 14/042 (2013.01); H10K 71/00 (2023.02)] 20 Claims
OG exemplary drawing
 
1. An organic vapor jet printing (OVJP) deposition device, comprising:
an OVJP print head comprising:
a micronozzle array comprising at least one inlet through which organic material entrained in a carrier gas enters the micronozzle array and a plurality of nozzle outlets through which material is ejected from the micronozzle array; and
a shutter comprising a movable structure having an aperture and disposed between the plurality of nozzle outlets and the inlet, wherein the shutter is movable from an open configuration in which the aperture is aligned with the inlet and a closed configuration in which the aperture is not aligned with the inlet, wherein the shutter allows gas flow into the plurality of nozzle outlets in the open configuration and prevents gas flow into the plurality of nozzle outlets in the closed configuration.