US 12,227,621 B2
Film-forming composition
Wataru Shibayama, Toyama (JP); Yuichi Goto, Toyama (JP); Shun Kubodera, Toyama (JP); Satoshi Takeda, Toyama (JP); Ken Ishibashi, Toyama (JP); and Makoto Nakajima, Toyama (JP)
Assigned to NISSAN CHEMICAL CORPORATION, Tokyo (JP)
Appl. No. 17/288,665
Filed by NISSAN CHEMICAL CORPORATION, Tokyo (JP)
PCT Filed Oct. 25, 2019, PCT No. PCT/JP2019/042036
§ 371(c)(1), (2) Date Apr. 26, 2021,
PCT Pub. No. WO2020/085508, PCT Pub. Date Apr. 30, 2020.
Claims priority of application No. 2018-202238 (JP), filed on Oct. 26, 2018.
Prior Publication US 2021/0395462 A1, Dec. 23, 2021
Int. Cl. H01L 21/027 (2006.01); C08G 77/26 (2006.01); H01L 21/308 (2006.01)
CPC C08G 77/26 (2013.01) [H01L 21/0274 (2013.01); H01L 21/3081 (2013.01); H01L 21/3086 (2013.01)] 14 Claims
 
1. A film-forming composition, comprising at least one kind selected from a hydrolyzable silane, a hydrolysis product thereof, and a hydrolysis condensate thereof, and a solvent,
the hydrolyzable silane including a crosslinkable group-containing silane represented by Formula (1):
R1R2aSi(R3)3-a  (1)
wherein in Formula (1), R1 is a group bonding to a silicon atom, and independently represents an organic group containing an amide group or an amino group having an alkoxy alkyl group on a nitrogen atom thereof,
R2 is a group bonding to a silicon atom, and independently represents an alkyl group that may be substituted, an aryl group that may be substituted, an aralkyl group that may be substituted, a halogenated alkyl group that may be substituted, a halogenated aryl group that may be substituted, a halogenated aralkyl group that may be substituted, an alkoxy alkyl group that may be substituted, an alkoxy aryl group that may be substituted, an alkoxy aralkyl group that may be substituted, or an alkenyl group that may be substituted, or represents an organic group containing an epoxy group, an acryloyl group, a methacryloyl group, a mercapto group, an amino group, or a cyano group,
R3 is a group or an atom bonding to a silicon atom, and independently represents an alkoxy group, an aralkyloxy group, an acyloxy group, or a halogen atom, and
a is an integer of 0 to 2.
 
14. A crosslinkable group-containing silane, represented by Formula (1):
R1R2aSi(R3)3-a  (1)
wherein, in Formula (1), R1 is a group bonding to a silicon atom, and independently represents a group represented by any one of the following Formulae (A1) and (A3) to (A10):

OG Complex Work Unit Chemistry
wherein, in Formulae (A1) and (A3) to (A10),
each of R101 and R103 to R115 independently represents a hydroxy alkyl group or an alkoxy alkyl group,
each of L independently represents an alkylene group,
each of RAC independently represents an alkyl carbonyl group, and
each of ra to rf is independently an integer of 0 to 4,
R2 is a group bonding to a silicon atom, and independently represents an alkyl group that may be substituted, an aryl group that may be substituted, an aralkyl group that may be substituted, a halogenated alkyl group that may be substituted, a halogenated aryl group that may be substituted, a halogenated aralkyl group that may be substituted, an alkoxy alkyl group that may be substituted, an alkoxy aryl group that may be substituted, an alkoxy aralkyl group that may be substituted, or an alkenyl group that may be substituted, or represents an organic group containing an epoxy group, an acryloyl group, a methacryloyl group, a mercapto group, an amino group, or a cyano group,
R3 is a group or an atom bonding to a silicon atom, and independently represents an alkoxy group, an aralkyloxy group, an acyloxy group, or a halogen atom, and
a is an integer of 0 to 2.