US 12,227,409 B2
Robust inertial sensor self-test
Aurelio Pellegrini, Sestola (IT)
Assigned to InvenSense, Inc., San Jose, CA (US)
Filed by InvenSense, Inc., San Jose, CA (US)
Filed on Dec. 9, 2021, as Appl. No. 17/546,928.
Prior Publication US 2023/0183058 A1, Jun. 15, 2023
Int. Cl. B81B 3/00 (2006.01); G01P 15/08 (2006.01)
CPC B81B 3/0051 (2013.01) [G01P 15/08 (2013.01); B81B 2201/0235 (2013.01); B81B 2201/0242 (2013.01); G01P 2015/0868 (2013.01)] 21 Claims
OG exemplary drawing
 
1. A method for performing a self-test of an inertial sensor, comprising:
generating, by processing circuitry of the inertial sensor, a drive signal;
generating, by processing circuitry of the inertial sensor, a non-periodic self-test signal pattern;
providing the drive signal to one or more drive electrodes of the inertial sensor;
providing the non-periodic self-test signal pattern to one or more self-test drive electrodes of the inertial sensor;
providing, by the one or more drive electrodes, the drive signal to a proof mass of the inertial sensor, wherein the drive signal functions as a carrier signal for a vibration of the proof mass;
driving, by the one or more self-test drive electrodes, the proof mass of the inertial sensor in accordance with the non-periodic self-test signal pattern;
sensing, by one or more sense electrodes of the inertial sensor, the movement of the proof mass while the proof mass is driven by the one or more self-test drive electrodes;
generating, by the processing circuitry of the inertial sensor, a received signal based on the sensed movement of the proof mass;
removing the carrier signal from the received signal to generate a sense signal;
correlating, by the processing circuitry, the sense signal directly with the non-periodic self-test signal pattern; and
identifying, by the processing circuitry, an error based on the correlating.