CPC B65G 54/02 (2013.01) [H01L 21/67709 (2013.01); H01L 21/67724 (2013.01); H01L 21/67727 (2013.01); H01L 21/67733 (2013.01); B65G 2201/0297 (2013.01)] | 18 Claims |
1. An article transport vehicle that conveys an article between manufacturing facilities along a rail of an article transport system in a manufacturing plant, the article transport vehicle comprising:
an article holder including a space in which the article is accommodated;
a vehicle body including:
a base plate rotatably coupled to the article holder; and
a first side bar erected from an upper surface of the base plate and including a vertical bar extending in a vertical direction perpendicular to an upper surface of the base plate and a horizontal bar extending in a horizontal direction parallel to the upper surface of the base plate outwardly from an upper end of the vertical bar;
a magnetic levitation actuator installed at the base plate and including:
a first horizontal magnetic levitation actuator attached at a side surface of the base plate; and
a second horizontal magnetic levitation actuator attached at the upper surface of the base plate and disposed at a region defined by the vertical bar, the horizontal bar, and the upper surface of the base plate; and
a linear motor coil installed at a side surface of the horizontal bar of the vehicle body.
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