US 12,227,008 B2
Flow passage forming member, liquid ejecting head, liquid ejecting apparatus, method of producing flow passage forming member, and method of producing liquid ejecting head
Hajime Onishi, Chino (JP); Taisuke Nakashima, Chino (JP); Yasutaka Matsumoto, Suwa (JP); and Yutaka Yamazaki, Shiojiri (JP)
Assigned to SEIKO EPSON CORPORATION, (JP)
Filed by SEIKO EPSON CORPORATION, Tokyo (JP)
Filed on Dec. 22, 2022, as Appl. No. 18/086,700.
Claims priority of application No. 2021-209011 (JP), filed on Dec. 23, 2021.
Prior Publication US 2023/0202174 A1, Jun. 29, 2023
Int. Cl. B41J 2/14 (2006.01); G03G 5/06 (2006.01); G03G 5/082 (2006.01); G03G 8/00 (2006.01); G03G 15/01 (2006.01)
CPC B41J 2/14201 (2013.01) [G03G 5/0662 (2013.01); G03G 5/08228 (2013.01); G03G 8/00 (2013.01); G03G 15/0105 (2013.01); G03G 2215/2048 (2013.01)] 14 Claims
OG exemplary drawing
 
1. A flow passage forming member comprising
a flow passage forming member main body that is formed of a resin material and defines at least a part of a flow passage;
a metal protective film that is provided on a surface of the flow passage forming member main body defining at least the flow passage and is formed of a metal material; and
a protective film that is laminated on the metal protective film and contains an oxide or a nitride of at least one element selected from the group consisting of tantalum (Ta), titanium (Ti), zirconium (Zr), niobium (Nb), vanadium (V), hafnium (Hf), silicon (Si), aluminum (Al), tungsten (W), and yttrium (Y).