US 12,226,805 B2
Substrate cleaning brush
Tadashi Kawaguchi, Koga (JP); and Tomoyuki Nakagaki, Koga (JP)
Assigned to AION CO., LTD., Osaka (JP)
Appl. No. 17/614,270
Filed by AION CO., LTD., Osaka (JP)
PCT Filed May 27, 2020, PCT No. PCT/JP2020/021024
§ 371(c)(1), (2) Date Nov. 24, 2021,
PCT Pub. No. WO2020/241726, PCT Pub. Date Dec. 3, 2020.
Claims priority of application No. 2019-099190 (JP), filed on May 28, 2019.
Prior Publication US 2022/0212234 A1, Jul. 7, 2022
Int. Cl. B08B 1/12 (2024.01); A46B 13/00 (2006.01); A46B 13/02 (2006.01); B08B 1/32 (2024.01); H01L 21/67 (2006.01)
CPC B08B 1/12 (2024.01) [A46B 13/008 (2013.01); A46B 13/02 (2013.01); B08B 1/32 (2024.01); A46B 2200/3073 (2013.01); H01L 21/67046 (2013.01)] 6 Claims
OG exemplary drawing
 
1. A substrate cleaning brush that cleans a substrate by rotating together with a brush rotation shaft of a substrate cleaning apparatus whose axis extends in an up-down direction, comprising:
a brush holder that has
a holder upper part to be attached to a lower end of the brush rotation shaft,
a cylindrical holder lower part extending downward from the holder upper part in a holder attached state in which the holder upper part is attached to the brush rotation shaft,
a hollow disc-shaped holder bottom plate part protruding radially inward from an inner edge of a lower end of the holder lower part in the holder attached state, and
a cylindrical brush deformation restricting part protruding downward from the inner peripheral edge of the holder bottom plate part in the holder attached state,
in the holder attached state, a lower surface of the holder upper part, an inner peripheral surface of the holder lower part, and an upper surface of the holder bottom plate part defining a brush accommodating space, an inner peripheral edge of the holder bottom plate part and an inner peripheral surface of the brush deformation restricting part defining a circular holder opening having a smaller diameter than an inner diameter of the holder lower part, and a center axis of the brush accommodating space and a center axis of the holder opening substantially coinciding with the axis of the brush rotation shaft; and
a brush body that integrally has
a held part having a circular column shape that is incapable of penetrating through the holder opening and accommodated and held in the brush accommodating space, and
a cleaning part having a circular column shape that is smaller in diameter than the held part and capable of penetrating through the holder opening, and penetrating through the holder opening and projecting downward in a brush attached state in which the held part is held in the brush accommodating space in the holder attached state, and
in the brush attached state, lets a lower surface of the cleaning part contact the substrate from above to clean the substrate, wherein
a top-to-bottom length of the holder opening of the brush holder is longer than or equal to ¼ of a protruding length of the cleaning part of the brush body from the held part thereof and shorter than the protruding length of the cleaning part.