US 12,226,801 B2
Apparatus and system for tuning the resonant frequency of a piezoelectric micromachined ultrasonic transducer
Stefon Shelton, Oakland, CA (US); Fabian Goericke, Berkeley, CA (US); and Benedict Costello, Berkeley, CA (US)
Assigned to InvenSense, Inc., San Jose, CA (US)
Filed by InvenSense, Inc., San Jose, CA (US)
Filed on Jan. 25, 2024, as Appl. No. 18/423,200.
Application 18/423,200 is a division of application No. 16/957,064, granted, now 11,938,515, previously published as PCT/US2018/067260, filed on Dec. 21, 2018.
Claims priority of provisional application 62/609,987, filed on Dec. 22, 2017.
Prior Publication US 2024/0157398 A1, May 16, 2024
Int. Cl. B06B 1/06 (2006.01); H10N 30/04 (2023.01)
CPC B06B 1/0629 (2013.01) [B06B 1/0651 (2013.01); B06B 1/0666 (2013.01); B06B 1/0685 (2013.01); H10N 30/04 (2023.02); Y10T 29/42 (2015.01); Y10T 29/5313 (2015.01)] 9 Claims
OG exemplary drawing
 
1. An apparatus comprising:
a plurality of piezoelectric micromachined ultrasonic transducers (PMUTs) (500), each PMUT of the plurality thereof including a membrane (204) that is characterized by a first design that includes a first lateral dimension (D1), a center (C1), and a periphery (P1), wherein each PMUT of the plurality thereof has a resonant frequency that is based on at least one of the stiffness and mass of its respective membrane;
wherein the membrane of a first PMUT (502-1,1) of the plurality thereof has a first profile of at least one of stiffness and mass across its respective first lateral dimension, and wherein the first PMUT has a first resonant frequency that is based on the first profile;
wherein the membrane of a second PMUT (502-M,1) of the plurality thereof has a second profile of at least one of stiffness and mass across its respective first lateral dimension, and wherein the second PMUT has a second resonant frequency that is based on the second profile, and further wherein the second profile is different from the first profile; and
wherein the first and second resonant frequencies are within an acceptable range of resonant frequencies (Δf0).