US 12,226,772 B2
Biochip and manufacturing method thereof
Xiaochen Ma, Beijing (CN); Ce Ning, Beijing (CN); Guangcai Yuan, Beijing (CN); Xin Gu, Beijing (CN); and Zhengliang Li, Beijing (CN)
Assigned to BOE TECHNOLOGY GROUP CO., LTD., Beijing (CN)
Appl. No. 17/432,580
Filed by BOE TECHNOLOGY GROUP CO., LTD., Beijing (CN)
PCT Filed Jan. 22, 2021, PCT No. PCT/CN2021/073249
§ 371(c)(1), (2) Date Aug. 20, 2021,
PCT Pub. No. WO2021/147988, PCT Pub. Date Jul. 29, 2021.
Claims priority of application No. 202010075614.1 (CN), filed on Jan. 22, 2020.
Prior Publication US 2022/0126294 A1, Apr. 28, 2022
Int. Cl. B01L 3/00 (2006.01); C23C 14/04 (2006.01); C23C 14/34 (2006.01)
CPC B01L 3/502753 (2013.01) [C23C 14/04 (2013.01); C23C 14/34 (2013.01); B01L 2200/025 (2013.01); B01L 2200/027 (2013.01); B01L 2200/0631 (2013.01); B01L 2200/0652 (2013.01); B01L 2300/042 (2013.01); B01L 2300/0819 (2013.01); B01L 2300/0896 (2013.01); B01L 2400/0421 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A biochip comprising:
a guide layer;
a channel layer on the guide layer, the channel layer having within the channel layer a plurality of first channels extending in a first direction, each first channel of the plurality of first channels projecting a first orthographic projection onto the guide layer;
a plurality of second channels extending in a second direction, wherein each of the plurality of second channels is in communication with the plurality of first channels, and wherein the plurality of second channels is disposed in a first layer where the channel layer is located, or is disposed in a second layer where the channel layer and the guide layer are located;
an encapsulation cover plate on a side of the channel layer distal to the guide layer;
a driving unit configured to drive biomolecules to move;
a plurality of first grooves, each first groove of the plurality of first grooves projecting a second orthographic projection onto the guide layer wherein the plurality of first grooves extending along the first direction are disposed on a side of the guide layer proximal to the channel layer, and have a one-to-one correspondence with the plurality of first channels, and the first orthographic projection of each first channel of the plurality of first channels on the guide layer is within the second orthographic projection of a corresponding first groove of the plurality of first grooves on the guide layer.