US 12,226,715 B2
Degassers, degassing systems and the methods of using them
David C. Eshelman, Escondido, CA (US); Bradley Taylor Reese, Trexlertown, PA (US); Jeffery C. Barthold, Barto, PA (US); and Christopher D. Fontana, Hatfield, PA (US)
Assigned to Versum Materials US, LLC, Tempe, AZ (US)
Appl. No. 17/442,705
Filed by VERSUM MATERIALS US, LLC, Tempe, AZ (US)
PCT Filed Mar. 24, 2020, PCT No. PCT/US2020/024494
§ 371(c)(1), (2) Date Sep. 24, 2021,
PCT Pub. No. WO2020/198244, PCT Pub. Date Oct. 1, 2020.
Claims priority of provisional application 62/824,094, filed on Mar. 26, 2019.
Prior Publication US 2022/0176275 A1, Jun. 9, 2022
Int. Cl. B01D 19/00 (2006.01); B01D 63/06 (2006.01)
CPC B01D 19/0036 (2013.01) [B01D 63/069 (2022.08); B01D 2221/14 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A degasser for removing molecules of gasses entrapped or dissolved in a processing liquid, the degasser comprising:
a vacuum chamber having one or more than one vacuum chamber wall;
one or more than one fluid inlet and one or more than one fluid outlet through which the processing liquid is respectively passed into and out of the vacuum chamber, the one or more than one inlet and the one or more than one outlet penetrating at least one of the vacuum chamber walls;
two or more separators located inside the vacuum chamber and being configured to be pervious to the molecules of the entrapped or dissolved gas but impervious to the processing liquid;
at least one vacuum for applying through a vacuum port a pressure differential across the two or more separators to cause the molecules of the entrapped or dissolved gas to leave the processing liquid and to permeate through the two or more separators thereby removing the entrapped or dissolved gas from the processing liquid;
one or more than one feed line in fluid communication with the one or more than one inlet and the two or more separators; and
at least one valve upstream of each separator except for one separator so that all but one separator can be isolated from that one separator.