CPC H04R 23/008 (2013.01) [G01H 9/004 (2013.01); G02F 1/125 (2013.01); H04R 2410/03 (2013.01)] | 15 Claims |
1. A microphone chip, wherein the microphone chip comprises:
a substrate and a diaphragm that are disposed oppositely;
a reflector located on a side of the diaphragm and that is close to the substrate;
a grating group located between the substrate and the diaphragm; and
an optical emitter and an optical detector that are located between the substrate and the grating group, wherein
the grating group comprises a plurality of gratings, and distances between at least two gratings in the plurality of gratings and the reflector are different, wherein a difference g between the distances between the at least two gratings in the plurality of gratings and the reflector satisfies:
(2n−1)×λ/8−λ/16≤g≤(2n−1)×λ/8+λ/16, wherein λ is a wavelength of light emitted by the optical emitter, and n is an integer greater than 0.
|