US 11,902,740 B2
High-sensitivity piezoelectric microphone
Chengliang Sun, Wuhan (CN); Bohao Hu, Wuhan (CN); Binghui Lin, Wuhan (CN); Zhipeng Wu, Wuhan (CN); Wei Zhu, Wuhan (CN); Lei Wang, Wuhan (CN); and Yu Zhou, Wuhan (CN)
Assigned to Wuhan MEMSonics Technologies Co., Ltd., Wuhan (CN)
Filed by WUHAN MEMSONICS TECHNOLOGIES CO., LTD., Wuhan (CN)
Filed on Feb. 28, 2022, as Appl. No. 17/681,871.
Application 17/681,871 is a continuation in part of application No. PCT/CN2020/105351, filed on Jul. 29, 2020.
Claims priority of application No. 201910799686.8 (CN), filed on Aug. 28, 2019; and application No. 201911299953.1 (CN), filed on Dec. 17, 2019.
Prior Publication US 2022/0182767 A1, Jun. 9, 2022
Int. Cl. H04R 17/02 (2006.01); H04R 1/28 (2006.01); H04R 1/40 (2006.01); H04R 3/00 (2006.01)
CPC H04R 17/02 (2013.01) [H04R 1/2892 (2013.01); H04R 1/406 (2013.01); H04R 3/005 (2013.01); H04R 2201/003 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A piezoelectric microphone, comprising:
a wafer substrate comprising a cavity;
a plurality of cantilever beams with a piezoelectric deck structure;
a fixed column;
a plurality of flexible elastic members; and
a connecting section;
wherein:
the plurality of cantilever beams each comprises a fixed end and a free end suspended above the cavity;
the plurality of cantilever beams is of a structure in which one end is narrow and the other end is wide, and the fixed end is relatively narrow;
the fixed column is disposed at a center of a bottom surface of the cavity; fixed ends of the plurality of cantilever beams are all connected to a top surface of the fixed column;
a gap is provided between every two adjacent cantilever beams;
the plurality of flexible elastic members is connected to free ends of two adjacent cantilever beams to enable the cantilever beams to vibrate synchronously; and
the connecting section is disposed in one gap between every two adjacent cantilever beams for leading out an electric signal of the cantilever beams.