CPC H04R 1/023 (2013.01) [B81B 7/02 (2013.01); H04R 1/08 (2013.01); H04R 1/2803 (2013.01); H04R 1/2873 (2013.01); B81B 2201/0257 (2013.01); H04R 2499/11 (2013.01)] | 26 Claims |
1. A microphone module, comprising:
a substrate;
a cover mounted to the substrate and at least partially defining a back volume of the microphone module,
a front volume that is separated from the back volume by a sound-responsive element and that is fluidly coupled to a first opening in the substrate;
a non-porous membrane that defines a sealed volume that is fluidly coupled to the front volume via the first opening, and that provides a liquid-resistant seal between the front volume and a first environment external to the microphone module on a first side of the substrate;
a second opening in the substrate that extends from the sealed volume defined by the non-porous membrane, through the substrate, to a second environment external to the microphone module on an opposing second side of the substrate; and
an inductive filter disposed between at least a portion of the non-porous membrane and at least a portion of the substrate, the inductive filter having a first port coupled to the front volume, a second port coupled to the second opening in the substrate, and a serpentine fluid pathway from the first port to the second port.
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