US 11,902,665 B2
Automated application of drift correction to sample studied under electron microscope
Franklin Stampley Walden, II, Raleigh, NC (US); John Damiano, Jr., Holly Springs, NC (US); David P. Nackashi, Raleigh, NC (US); Daniel Stephen Gardiner, Wake Forest, NC (US); Mark Uebel, Morrisville, NC (US); Alan Philip Franks, Durham, NC (US); Benjamin Jacobs, Apex, NC (US); Joshua Brian Friend, Raleigh, NC (US); Katherine Elizabeth Marusak, Cary, NC (US); Nelson L Marthe, Jr., Cary, NC (US); and Benjamin Bradshaw Larson, Cary, NC (US)
Assigned to Protochips, Inc., Morrisville, NC (US)
Filed by Protochips, Inc., Morrisville, NC (US)
Filed on Jan. 26, 2022, as Appl. No. 17/585,222.
Application 17/585,222 is a continuation in part of application No. 17/545,651, filed on Dec. 8, 2021, granted, now 11,477,388.
Application 17/545,651 is a continuation of application No. 17/210,702, filed on Mar. 24, 2021, granted, now 11,399,138.
Application 17/210,702 is a continuation of application No. 16/951,297, filed on Nov. 18, 2020, granted, now 10,986,279, issued on Apr. 20, 2021.
Application 16/951,297 is a continuation of application No. PCT/US2020/045937, filed on Aug. 12, 2020.
Claims priority of provisional application 62/888,309, filed on Aug. 16, 2019.
Prior Publication US 2022/0247934 A1, Aug. 4, 2022
Int. Cl. G01B 11/16 (2006.01); H04N 23/695 (2023.01); G06T 7/33 (2017.01); G06T 7/215 (2017.01); H01J 37/20 (2006.01)
CPC H04N 23/695 (2023.01) [G06T 7/215 (2017.01); G06T 7/337 (2017.01); H01J 37/20 (2013.01); G06T 2207/10061 (2013.01); H01J 2237/2594 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method for measuring electron dose in a sample with a transmission electron microscope (TEM), the method comprising:
taking multiple measurements of the area of an electron beam of the TEM and the amount of current produced by the electron beam of the TEM,
wherein the TEM has different condenser lens settings for the multiple measurements of the area of the electron beam and the amount of current produced by the electron beam;
using the electron beam to excite the sample during an experiment performed on the sample using the TEM, wherein the TEM is set with particular condenser lens settings;
determining a beam area and a beam current of the electron beam used to excite the sample during the experiment for the particular condenser lens settings of the TEM based on the multiple measurements of the area of the electron beam and the amount of current produced by the electron beam; and
measuring an electron dose rate on the sample during the experiment based on the determined beam area and the determined beam current for the particular condenser lens settings of the TEM.