CPC H04B 10/2589 (2020.05) [H01J 37/32935 (2013.01); H04B 10/564 (2013.01); H04B 10/807 (2013.01)] | 24 Claims |
1. A substrate support assembly configured to support a substrate during substrate processing in a processing chamber, the substrate support assembly comprising:
a first optical receiver embedded in the substrate support assembly to receive a first optical signal and a first optical data through a fiber optic cable;
a power converter embedded in the substrate support assembly to generate DC power based on the first optical signal and the first optical data received by the first optical receiver;
a first circuit embedded in the substrate support assembly to:
receive the DC power from the power converter; and
receive a second data from a sensor disposed in the substrate support assembly in response to the first optical data, the sensor configured to sense a parameter associated with a process performed in the processing chamber; and
a first optical transmitter embedded in the substrate support assembly to transmit the second data as a second optical data through the fiber optic cable.
|