US 11,901,875 B2
Surface acoustic wave sensor assembly
Chuang-Chia Lin, San Ramon, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Oct. 12, 2020, as Appl. No. 17/068,725.
Prior Publication US 2022/0116013 A1, Apr. 14, 2022
Int. Cl. H03H 9/02 (2006.01); H10N 30/30 (2023.01)
CPC H03H 9/02842 (2013.01) [H03H 9/02543 (2013.01); H10N 30/302 (2023.02)] 14 Claims
OG exemplary drawing
 
1. A sensor device comprising:
a first integrated sensor assembly, the first integrated sensor assembly comprising:
a first surface acoustic wave (SAW) sensor disposed on a substrate comprising at least a layer of a piezoelectric material, wherein the first SAW sensor is adapted to measure an environmental condition of an environment responsive to receiving a first incoming RF signal, the first SAW sensor comprising:
a first interdigitated transducer (IDT) formed on a first region of the piezoelectric material, the first IDT to generate a first SAW based on the environmental condition, responsive to receiving the first incoming RF signal; and
a second IDT formed on a second region of the piezoelectric material, wherein the second IDT is to receive the first SAW from the first IDT and generate a first oscillating electric potential associated with a first acoustic frequency of the received first SAW,
a first RF antenna formed on a third region of the piezoelectric material; and
a second RF antenna, coupled to the second IDT, formed on a fourth region of the piezoelectric material; wherein the first SAW sensor and the first RF antenna and the second RF antenna are integrated with one another on the piezoelectric material, and wherein:
the second RF antenna is to receive the first incoming RF signal;
the second IDT is further to generate a second SAW based on the environmental condition responsive to receiving the first incoming RF signal;
the first IDT is further to receive the second SAW from the second IDT;
the first IDT is further to generate a second oscillating electric potential associated with a second acoustic frequency of the received SAW; and
the first RF antenna is further to output an outgoing RF signal in accordance with the second oscillating electric potential.