CPC H01L 21/6833 (2013.01) [H01J 37/32724 (2013.01); H01L 21/67103 (2013.01); H01J 2237/2007 (2013.01); H01J 2237/332 (2013.01)] | 12 Claims |
1. A substrate support assembly comprising:
an electrostatic chuck body defining a substrate support surface;
a first bipolar electrode embedded within the electrostatic chuck body beneath the substrate support surface;
a second bipolar electrode embedded within the electrostatic chuck beneath the substrate support surface, wherein the first bipolar electrode and the second bipolar electrode are separated by a gap;
a third electrode positioned radially outward from and extending about the first bipolar electrode and the second bipolar electrode
a connection for a first radio frequency (RF) power supply or variable capacitor coupled with the first bipolar electrode and/or the second bipolar electrode; and
a connection for a second RF power supply or variable capacitor coupled with the third bipolar electrode.
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