	US 11,901,205 B2
	Membrane diffuser for a substrate container
Mark V. Smith, Colorado Springs, CO (US); Nicholas Thelen, Colorado Springs, CO (US); Matthew A. Fuller, Colorado Springs, CO (US); Michael C. Zabka, New Prague, MN (US); Sung In Moon, Chaska, MN (US); and John P. Puglia, Townsend, MA (US)
Assigned to ENTEGRIS, INC., Billerica, MA (US)
Filed by ENTEGRIS, INC., Billerica, MA (US)
Filed on Feb. 14, 2023, as Appl. No. 18/109,756.
Application 18/109,756 is a continuation of application No. 16/552,005, filed on Aug. 27, 2019, granted, now 11,610,795.
Claims priority of provisional application 62/874,647, filed on Jul. 16, 2019.
Claims priority of provisional application 62/837,389, filed on Apr. 23, 2019.
Claims priority of provisional application 62/723,979, filed on Aug. 28, 2018.
Prior Publication US 2023/0197490 A1, Jun. 22, 2023
Int. Cl. H01L 21/673 (2006.01); H01L 21/67 (2006.01)

CPC H01L 21/67393 (2013.01) [H01L 21/67017 (2013.01); H01L 21/67376 (2013.01); H01L 21/67386 (2013.01)]

9 Claims

1. A purge diffuser for use in a system for transporting substrates comprising:

i) a purge diffuser core having an internal purge gas channel, one or more diffuser ports, one or more diverters and an outer surface;

ii) filter media secured to the outer surface of the purge diffuser core; and

iii) a purge port connector for mounting the purge diffuser to a purge port of a substrate container for transporting substrates;

wherein the one or more diverters project into the internal purge gas channel from an inner surface of the purge diffuser core bordering the internal purge gas channel;

wherein the one or more diverters bridge across the internal purge gas channel from a first location on the inner surface of the puree diffuser core to a second location on the inner surface of the purge diffuser core, the second location being separated from the first location; and

wherein the purge diffuser core, the filter media and the purge port are arranged such that there is a continuous path for purge gas entering through the purge port connector to enter the internal purge gas channel, exit the internal purge gas channel through the diffuser ports, and pass through the filter media.