	US 11,901,169 B2
	Barrier coatings
Jeffrey W. Elam, Elmhurst, IL (US); Anil U. Mane, Naperville, IL (US); Mark Popecki, Durham, NH (US); and Michael Minot, Andover, MA (US)
Assigned to UCHICAGO ARGONNE, LLC, Chicago, IL (US); and INCOM, INC., Charlton, MA (US)
Filed by UCHICAGO ARGONNE, LLC, Chicago, IL (US); and INCOM, INC., Charlton, MA (US)
Filed on Feb. 14, 2022, as Appl. No. 17/671,135.
Prior Publication US 2023/0260736 A1, Aug. 17, 2023
Int. Cl. H01J 9/12 (2006.01); H01J 43/24 (2006.01); C23C 16/455 (2006.01); C23C 16/40 (2006.01); H01J 9/42 (2006.01); H01J 40/04 (2006.01); H01J 40/16 (2006.01)

CPC H01J 9/125 (2013.01) [C23C 16/403 (2013.01); C23C 16/45527 (2013.01); C23C 16/45553 (2013.01); H01J 9/42 (2013.01); H01J 40/04 (2013.01); H01J 40/16 (2013.01); H01J 43/246 (2013.01)]

15 Claims

1. An electron detector device comprising:

a microchannel plate having a plurality of channels extending therethrough;

a resistive layer deposited on the microchannel plate;

an emissive layer deposited on the resistive layer; and

an interlayer deposited between the resistive layer and the emissive layer;

wherein the interlayer comprises a metal oxyfluoride; and

wherein the metal oxyfluoride is MgO_xF_y, where x is greater than 0 and less than 1 and y is greater than 0 and less than 2(1−x).