US 11,900,586 B2
Hot spot defect detecting method and hot spot defect detecting system
Chien-Huei Chen, Kaohsiung (TW); Pei-Chao Su, Hsinchu County (TW); Xiaomeng Chen, Hsinchu County (TW); Chan-Ming Chang, Hsinchu (TW); Shih-Yung Chen, Hsinchu (TW); Hung-Yi Chung, Taoyuan (TW); Kuang-Shing Chen, Hsinchu (TW); Li-Jou Lee, Hsinchu (TW); Yung-Cheng Lin, Hsinchu (TW); Wei-Chen Wu, Hsinchu (TW); Shih-Chang Wang, Hsinchu (TW); and Chien-An Lin, Hsinchu (TW)
Assigned to Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu (TW)
Filed by Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu (TW)
Filed on Dec. 15, 2020, as Appl. No. 17/121,760.
Application 17/121,760 is a continuation of application No. 16/116,899, filed on Aug. 29, 2018, granted, now 10,872,406.
Claims priority of provisional application 62/656,997, filed on Apr. 13, 2018.
Prior Publication US 2021/0118125 A1, Apr. 22, 2021
This patent is subject to a terminal disclaimer.
Int. Cl. G06T 7/00 (2017.01); G01N 21/88 (2006.01); G01N 21/95 (2006.01); G06N 3/04 (2023.01); G06N 3/08 (2023.01)
CPC G06T 7/001 (2013.01) [G01N 21/8851 (2013.01); G01N 21/9505 (2013.01); G06N 3/04 (2013.01); G06N 3/08 (2013.01); G06T 7/0006 (2013.01); G01N 2021/8854 (2013.01); G01N 2021/8887 (2013.01); G06T 2207/20081 (2013.01); G06T 2207/20084 (2013.01); G06T 2207/30141 (2013.01); G06T 2207/30148 (2013.01); G06T 2207/30168 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method for detecting hot spot defects, adapted to an electronic apparatus, the method comprising:
acquiring a plurality of defect images obtained by an inspection tool performing hot scans on a wafer manufactured with the design during runtime and aligning a hot spot map comprising a plurality of hot spot groups extracted from a design of the wafer to each of the defect images to locate the hot spot groups in each defect image;
for each of the defect images, dynamically mapping each of the hot spot groups located in the respective defect image to one of a plurality of threshold regions; and
for each of the threshold regions, determining at least a detection threshold based on noise levels of the pixels of each hot spot group in the respective threshold region, and determining the pixels having the pixel values deviating from the detection threshold as the hot spot defect.