US 11,899,477 B2
Fluid flow control system comprising a manifold assembly
Philip Ryan Barros, Pleasanton, CA (US); and Greg Patrick Mulligan, Milpitas, CA (US)
Assigned to ICHOR SYSTEMS, INC.
Filed by Ichor Systems, Inc., Fremont, CA (US)
Filed on Feb. 14, 2022, as Appl. No. 17/670,723.
Claims priority of provisional application 63/155,861, filed on Mar. 3, 2021.
Prior Publication US 2022/0283596 A1, Sep. 8, 2022
Int. Cl. F16K 27/00 (2006.01); G05D 7/06 (2006.01); F16K 37/00 (2006.01)
CPC G05D 7/0652 (2013.01) [F16K 27/003 (2013.01); F16K 37/005 (2013.01)] 16 Claims
OG exemplary drawing
 
1. A system for processing articles, the system comprising:
a first fluid supply configured to supply a first process fluid;
a second fluid supply configured to supply a second process fluid;
a first apparatus for controlling flow, the first apparatus having an inlet, an outlet, and a bleed port, the inlet of the first apparatus fluidly coupled to the first fluid supply;
a second apparatus for controlling flow, the second apparatus having an inlet, an outlet, and a bleed port, the inlet of the second apparatus fluidly coupled to the second fluid supply;
a first mounting substrate comprising a first vacuum port and a first outlet port, the first apparatus for controlling flow attached to the first mounting substrate such that the bleed port of the first apparatus for controlling flow is fluidly coupled to the first vacuum port and the outlet of the first apparatus for controlling flow is fluidly coupled to the first outlet port;
a second mounting substrate comprising a second vacuum port and a second outlet port, the second apparatus for controlling flow attached to the second mounting substrate such that the bleed port of the second apparatus for controlling flow is fluidly coupled to the second vacuum port and the outlet of the second apparatus for controlling flow is fluidly coupled to the second outlet port;
a vacuum manifold fluidly coupled to the first and second vacuum ports;
an outlet manifold fluidly coupled to the first and second outlet ports;
a vacuum source fluidly coupled to the vacuum manifold; and
a processing chamber fluidly coupled to the outlet manifold.