US 11,899,065 B2
System and method to weight defects with co-located modeled faults
David W. Price, Austin, TX (US); Robert J. Rathert, Mechanicsville, VA (US); Chet V. Lenox, Lexington, TX (US); and Oreste Donzella, San Ramon, CA (US)
Assigned to KLA Corporation, Milpitas, CA (US)
Filed by KLA Corporation, Milpitas, CA (US)
Filed on Aug. 17, 2022, as Appl. No. 17/889,491.
Claims priority of provisional application 63/315,098, filed on Mar. 1, 2022.
Prior Publication US 2023/0280399 A1, Sep. 7, 2023
Int. Cl. G06F 30/30 (2020.01); G01R 31/3183 (2006.01); G01R 31/3177 (2006.01)
CPC G01R 31/31835 (2013.01) [G01R 31/3177 (2013.01); G01R 31/318314 (2013.01)] 32 Claims
OG exemplary drawing
 
1. A screening system for generating defect criticality comprising:
a controller communicatively coupled to one or more sample analysis sub-systems, wherein the one or more sample analysis sub-systems comprise at least one test sub-system and at least one inline characterization sub-system, the controller including one or more processors configured to execute program instructions causing the one or more processors to:
identify defect results including a defect and a defect location of the defect;
receive fault test recipes, wherein each fault test recipe is configured to test one or more of a plurality of potential faults at a plurality of testing locations; and
identify a plurality of N-detect parameters, wherein each N-detect parameter of the plurality of N-detect parameters is associated with a testing location of a potential fault of the plurality of potential faults and is based on a countable number of times the fault test recipes are configured to test the potential fault;
determine a plurality of weighting parameters based on the plurality of N-detect parameters, wherein the plurality of weighting parameters are associated with the plurality of testing locations;
generate the defect criticality for the defect based on at least:
a proximity between the plurality of testing locations of the plurality of potential faults and the defect location of the defect; and
the plurality of weighting parameters associated with the plurality of testing locations.