CPC G01N 23/2251 (2013.01) [G01N 2223/07 (2013.01); G01N 2223/418 (2013.01); G01N 2223/505 (2013.01)] | 14 Claims |
1. A charged particle beam device comprising:
a detector configured to convert a photon emitted by a scintillator into an electrical signal; and
a first signal processor coupled with the detector and including a first microcontroller configured to:
receive the electrical signal from the detector;
detect a peak position of the electrical signal, a steepness of a rising section associated with the peak position, and a steepness of a falling section associated with the peak position;
classify the peak position based on the steepness of the rising section and the steepness of the falling section; and
form a detection image based on the classification of the peak position.
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