US 11,898,974 B2
Charged particle beam device, computer, and signal processing method for charged particle beam device
Hiroshi Oinuma, Tokyo (JP); Wen Li, Tokyo (JP); and Masashi Wada, Tokyo (JP)
Assigned to HITACHI HIGH-TECH CORPORATION, Tokyo (JP)
Filed by Hitachi High-Tech Corporation, Tokyo (JP)
Filed on Dec. 14, 2021, as Appl. No. 17/550,140.
Claims priority of application No. 2020-207203 (JP), filed on Dec. 15, 2020.
Prior Publication US 2022/0187228 A1, Jun. 16, 2022
Int. Cl. G01N 23/2251 (2018.01)
CPC G01N 23/2251 (2013.01) [G01N 2223/07 (2013.01); G01N 2223/418 (2013.01); G01N 2223/505 (2013.01)] 14 Claims
OG exemplary drawing
 
1. A charged particle beam device comprising:
a detector configured to convert a photon emitted by a scintillator into an electrical signal; and
a first signal processor coupled with the detector and including a first microcontroller configured to:
receive the electrical signal from the detector;
detect a peak position of the electrical signal, a steepness of a rising section associated with the peak position, and a steepness of a falling section associated with the peak position;
classify the peak position based on the steepness of the rising section and the steepness of the falling section; and
form a detection image based on the classification of the peak position.