US 11,898,958 B2
Method for measuring the trap density in a 2-dimensional semiconductor material
Alessandra Leonhardt, Leuven (BE); Cesar Javier Lockhart De La Rosa, Haacht (BE); Stefan De Gendt, Wijnegem (BE); Cedric Huyghebaert, Heverlee (BE); Steven Brems, Kessel-Lo (BE); and Thomas Nuytten, Pellenberg (BE)
Assigned to IMEC VZW, Leuven (BE); and Katholieke Universitiet, Leuven (BE)
Filed by IMEC VZW, Leuven (BE); and Katholieke Universiteit Leuven, KU LEUVEN R&D, Leuven (BE)
Filed on May 18, 2021, as Appl. No. 17/323,115.
Claims priority of application No. 20175167 (EP), filed on May 18, 2020.
Prior Publication US 2021/0356399 A1, Nov. 18, 2021
Int. Cl. G01N 21/64 (2006.01); G01N 21/95 (2006.01)
CPC G01N 21/6489 (2013.01) [G01N 21/9501 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A method comprising:
illuminating a layer of a two-dimensional (2D) semiconductor material with a first light beam having a first intensity, thereby generating first electron-hole pairs having a first concentration;
determining a first direct photoluminescence intensity Idir corresponding to direct bandgap radiative combination of the first electron-hole pairs and a first indirect photoluminescence intensity Iind corresponding to indirect bandgap radiative combination of the first electron-hole pairs;
illuminating the layer with a second light beam having a second intensity that is different from the first intensity, thereby generating second electron-hole pairs having a second concentration that is different from the first concentration;
determining a second direct photoluminescence intensity Ian corresponding to direct bandgap radiative combination of the second electron-hole pairs and a second indirect photoluminescence intensity Lind corresponding to indirect bandgap radiative combination of the second electron-hole pairs; and
determining a trap density of the layer based on the first concentration, the second concentration, the first direct photoluminescence intensity, the first indirect photoluminescence intensity, the second direct photoluminescence intensity, and the second indirect photoluminescence intensity.