US 11,898,940 B2
Leak detection system and inspection method for the system
Toru Maruyama, Tokyo (JP); Mitsunori Komatsu, Tokyo (JP); and Keisuke Kamiki, Tokyo (JP)
Assigned to EBARA CORPORATION, Tokyo (JP)
Filed by EBARA CORPORATION, Tokyo (JP)
Filed on Jul. 23, 2021, as Appl. No. 17/384,000.
Claims priority of application No. 2020-127424 (JP), filed on Jul. 28, 2020.
Prior Publication US 2022/0034745 A1, Feb. 3, 2022
Int. Cl. G01M 3/28 (2006.01); B24B 37/005 (2012.01); G01M 3/18 (2006.01); G01M 3/26 (2006.01)
CPC G01M 3/2807 (2013.01) [B24B 37/005 (2013.01); G01M 3/18 (2013.01); G01M 3/182 (2013.01); G01M 3/183 (2013.01); G01M 3/26 (2013.01); G01M 3/28 (2013.01); G01M 3/2846 (2013.01)] 10 Claims
OG exemplary drawing
 
1. An inspection method for use in a leak detection system configured to detect a fluid leak from a fluid line, the leak detection system including:
a leak detection line coupled to the fluid line extending between a supply valve and a return valve;
an on-off valve attached to the leak detection line;
a flow meter configured to measure a flow rate of fluid flowing through the leak detection line;
an operation controller configured to detect the fluid leak from the fluid line based on a first flow rate measured by the flow meter;
a drain line communicating with the fluid line and the leak detection line, the drain line being located downstream of the flow meter; and
a drain valve attached to the drain line, the method comprising:
measuring a second flow rate of a fluid in the leak detection line of the leak detection system by the flow meter; and
determining that the leak detection system has a defect when the second flow rate is lower than a predetermined reference value.