US 11,898,926 B2
Inspection apparatus and methods for precision vibration-isolation tabletops
Alexander B. V. Moutafis, Salem, MA (US); and Luc Owens Robitaille, Ipswich, MA (US)
Assigned to Technical Manufacturing Corporation, Peabody, MA (US)
Filed by Technical Manufacturing Corporation, Peabody, MA (US)
Filed on Sep. 11, 2020, as Appl. No. 17/018,136.
Claims priority of provisional application 62/900,397, filed on Sep. 13, 2019.
Prior Publication US 2021/0080348 A1, Mar. 18, 2021
Int. Cl. G01M 11/04 (2006.01); A47B 13/08 (2006.01); G01B 11/02 (2006.01)
CPC G01M 11/04 (2013.01) [A47B 13/08 (2013.01); G01B 11/02 (2013.01)] 23 Claims
OG exemplary drawing
 
1. A vibration-isolation inspection system comprising:
an inspection head having an imaging array and a perturbing device that imparts mechanical energy to a precision vibration-isolation tabletop; and
a system controller configured to control motion of the inspection head with respect to a surface of the precision vibration-isolation tabletop, wherein the system controller is configured to produce data indicating vibration-damping characteristics at a plurality of locations on the surface of the precision vibration-isolation tabletop.