US 11,898,912 B2
Hyperspectral imaging (HSI) apparatus and inspection apparatus including the same
Sungho Jang, Hwaseong-si (KR); Jungchul Lee, Hwaseong-si (KR); Jinseob Kim, Incheon (KR); Gwangsik Park, Hwaseong-si (KR); Minhwan Seo, Hwaseong-si (KR); Janghwi Lee, Hwaseong-si (KR); Wondon Joo, Incheon (KR); Jiyoung Chu, Gyeongju-si (KR); and Daehoon Han, Hwaseong-si (KR)
Assigned to SAMSUNG ELECTRONICS CO., LTD., Suwon-si (KR)
Filed by Samsung Electronics Co., Ltd., Suwon-si (KR)
Filed on Jul. 1, 2021, as Appl. No. 17/365,592.
Claims priority of application No. 10-2020-0163339 (KR), filed on Nov. 27, 2020.
Prior Publication US 2022/0170792 A1, Jun. 2, 2022
Int. Cl. G01J 3/28 (2006.01); G01J 3/02 (2006.01); G01J 3/24 (2006.01); G01J 3/04 (2006.01)
CPC G01J 3/2823 (2013.01) [G01J 3/021 (2013.01); G01J 3/04 (2013.01); G01J 3/24 (2013.01); G01J 2003/2826 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A hyperspectral imaging (HSI) apparatus comprising:
a first slit plate configured to introduce an output beam;
a first aspherical mirror configured to reflect the output beam which is introduced by the first slit plate;
a first planar grating having a planar reflective surface configured to generate a plurality of first split beams by splitting the output beam after its reflection by the first aspherical mirror; and
a first camera configured to detect the plurality of first split beams to obtain at least one of a two-dimensional HSI image and a 3-dimensional hyper-cube image,
wherein the reflection of the output beam by the first aspherical mirror is directly reflected to the first planar grating from the first aspherical mirror,
wherein the first planar grating provides the plurality of first split beams directly to the first aspherical mirror, and
wherein the plurality of first split beams are reflected by the first aspherical mirror to be provided to the first camera.