US 11,898,899 B2
Micro-opto-mechanical system sensor, arrangement and manufacturing method
Mitchell Anderson, Pully (CH); Clément Javerzac-Galy, Lausanne (CH); Olexiy Feofanov, Epalinges (CH); and Nicolas Abelé, Lausanne (CH)
Assigned to MIRAEX SA, Lausanne (CH)
Filed by MIRAEX SA, Lausanne (CH)
Filed on Feb. 12, 2021, as Appl. No. 17/175,403.
Claims priority of application No. 20157050 (EP), filed on Feb. 13, 2020.
Prior Publication US 2021/0255031 A1, Aug. 19, 2021
Int. Cl. G01H 9/00 (2006.01); B81B 3/00 (2006.01); B81B 7/00 (2006.01); B81B 7/02 (2006.01); B81C 3/00 (2006.01); G02B 6/26 (2006.01); G01L 9/00 (2006.01); G01L 1/24 (2006.01)
CPC G01H 9/004 (2013.01) [B81B 3/0027 (2013.01); B81B 7/0038 (2013.01); B81B 7/02 (2013.01); B81C 3/001 (2013.01); G01L 1/24 (2013.01); G01L 9/0017 (2013.01); G02B 6/262 (2013.01); B81B 2201/047 (2013.01); B81B 2203/0127 (2013.01); B81B 2203/0307 (2013.01)] 13 Claims
OG exemplary drawing
 
1. A micro-opto-mechanical system (MOMS) sensor comprising:
a fiber interface comprising a fiber passthrough for one or more optical fibers; and
a cavity comprising an element hermetically encapsulated within the cavity, wherein said element is movably anchored by SiN arms to walls of the cavity, wherein the SiN arms comprise anchor portions at first ends of the SiN arms connected to the element and at second ends of the SiN arms connected to the walls of the cavity,
wherein the fiber interface is configured to receive the fibers through the fiber passthrough into positions for communications of light between the element and the fibers.