CPC G01C 19/5698 (2013.01) [H05K 1/0296 (2013.01); H05K 1/0306 (2013.01); H05K 2201/0175 (2013.01); H05K 2201/09227 (2013.01)] | 20 Claims |
1. A rotation sensor, comprising:
a substrate having a top surface and an interior bottom surface;
an electrode module positioned on the top surface of the substrate and comprising:
a first set of electrodes configured to generate a bulk acoustic wave directly into the substrate, wherein at least a portion of the bulk acoustic wave is transduced into a shear wave upon reflection on the interior bottom surface of the substrate without use of a reflector;
a second set of electrodes configured to detect the shear wave; and
a controller in communication with the first set and second set of electrodes and configured to determine, based on the detected shear wave, an effect of Coriolis force on the sensor.
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