US 11,898,242 B2
Methods for forming a polycrystalline molybdenum film over a surface of a substrate and related structures including a polycrystalline molybdenum film
Bhushan Zope, Phoenix, AZ (US); Eric Christopher Stevens, Tempe, AZ (US); Shankar Swaminathan, Phoenix, AZ (US); Roghayyeh Lotfi, Scottsdale, AZ (US); Mustafa Muhammad, Gilbert, AZ (US); and Eric Shero, Phoenix, AZ (US)
Assigned to ASM IP Holding B.V.
Filed by ASM IP Holding B.V., Almere (NL)
Filed on Aug. 14, 2020, as Appl. No. 16/994,025.
Claims priority of provisional application 62/891,254, filed on Aug. 23, 2019.
Claims priority of provisional application 62/891,247, filed on Aug. 23, 2019.
Prior Publication US 2021/0054500 A1, Feb. 25, 2021
Int. Cl. C23C 16/08 (2006.01); C23C 16/40 (2006.01); C23C 16/34 (2006.01); C23C 16/02 (2006.01); C23C 16/455 (2006.01); G11C 5/06 (2006.01); H01L 21/28 (2006.01); H01L 29/06 (2006.01); H01L 29/423 (2006.01); H01L 29/49 (2006.01); H01L 29/78 (2006.01); H01L 29/786 (2006.01); H10B 12/00 (2023.01)
CPC C23C 16/34 (2013.01) [C23C 16/0272 (2013.01); C23C 16/08 (2013.01); C23C 16/45527 (2013.01); C23C 16/45553 (2013.01); G11C 5/063 (2013.01); H01L 21/28088 (2013.01); H01L 29/0673 (2013.01); H01L 29/42392 (2013.01); H01L 29/4908 (2013.01); H01L 29/4966 (2013.01); H01L 29/7851 (2013.01); H01L 29/78696 (2013.01); H10B 12/053 (2023.02); H10B 12/34 (2023.02); H10B 12/488 (2023.02)] 40 Claims
OG exemplary drawing
 
1. A method for forming a polycrystalline molybdenum film over a surface of a substrate, the method comprising:
providing a substrate into a reaction chamber;
depositing a nucleation film directly on an exposed surface of the substrate, wherein the nucleation film comprises a metal oxide nucleation film, wherein the metal oxide film comprises a metal oxide selected from the group consisting of aluminum oxide, tungsten oxide, ruthenium oxide, rhenium oxide, and iridium oxide; and
depositing a polycrystalline molybdenum film directly on the nucleation film;
wherein the polycrystalline molybdenum film comprises a plurality of molybdenum crystallites having an average crystallite size of less than 80 Angstroms.